California  Seal & Fastener,  Inc. 3350 Scott Boulevard, #10 , Santa Clara, CA 95054 Phone: (800) 988-2291              Fax: (408) 496-0174 Email: info@calseal.com         Map   CalSeal Northwest           CalSeal Texas

Authorized Distributors of

CHEMRAZ®

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Chemraz® Perfluoroelastomer Selection Guide
Compound Name	Compound Color	Tempearture Range (°C)	Hardness (Shore A)	Compression Set (%)*	Tensile (psi)	Elongation (%)	Modulus 50% Elongation(psi)	Modulus 100% Elongation (psi)
XCD	Black	-15 to 300	74	32	2600	217		610
High Thermal Resistance, Low Compression Set, used for High Temperature processes, such as LPCVD, RTP, Epitaxial Deposition, Crystal Growing, SoI Annealing
XRZ	Brown	-15 to 300	72	17	1250	255		250
Excellent Resistance to both etching and cleaning plasmas NF3 and other Fluorine based plasmas, High Thermal Resistance, Low Compression Set
513	White	-30 to 210	80	25	1660	165	540	1050
Good plasma resistance. Good physical properties. Minimal contamination. Excellent performance history as "universal product".
520	White	-30 to 240	90	35	1950	110	990	1780
Excellent plasma resistance. Outstanding physical properties. Low contaminants. Withstands higher sealing loads.  Excellent performance history in higher temperature applications.
550	Black	-30 to 210	75	25	1750	140	450	1150
Good chemical resistance. Good physical properties. Used where contamination requirements are less critical. Excellent performance history.
570	White	-30 to 210	70	35	1300	145	350	780
571	White	-30 to 210	80	35	1550	130	625	1240
Very low contaminants. Extended performance and added reliability. Good physical properties. Excellent performance history in wet systems.
592	White	-30 to 240	85	36	2100	120	700	1770
Excellent physical properties. Inert filler system assures excellent resistance to plasma attack.
629	Ivory	-20 to 260	75	30	2225	215		610
Exceptional Plasma Resistance in Oxygen and Fluorine environments, minimal particulation, for all dry processes except thermal processes above 260C.
639	Ivory	-20 to 260	81	34	2193	144	563	1303
Exceptional plasma resistance in oxygen and fluorine environments. Minimal particulation and surface degradation. High purity, very low metallic ion content
640	Brown	-20 to 290	80	25	1735	165		1115
Recommended for  Aggressive Plasma Systems, with enhanced resistance to Oxygen and Fluorine Plasmas for dry wafer processing, such as CVD, HPCVD, etc.
653	Black	-15 to 325	80	14/26**	1830	135	360	1090
Excellent plasma resistance. Used when contamination requirements are less critical. Suitable for higher temperature applications. Superior compression set.
655	Off-White	-20 to 315	82	15/45***	1870	190	600	1040
Service temperature up to 315° C. Excellent balance of physical properties. Minimal contamination. Withstands a variety of aggressive chemicals. Unlimited design flexibility.
656	Translucent	-30 to 232	70	24	1504	238	209	384
Low Durometer FFKM material with Low Metallic Ion content, recommended for use in CVD, Etch and diffusion equipment applications.
667	Burgundy	-30 to 300	65	25	1400	270	140	240
Excellent Resistance to dry O2 based plasma etch systems. Resists cracking and has improved physical properties for Oxide Etch wafer processing systems.
E38	White	-20 to 260	80	30	2200	150	410	1100
Minimal contamination. Withstands a variety of aggressive chemicals. Excellent physical properties. Low metal ion content. Suitable for higher temperature applications.

        70 hours @ 204°C @ 25% deflection
  ** 70 hours @ 288°C @ 25% deflection
***70 hours @ 315°C @ 25% deflection

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For More Information on Perfluoroelastomers
Please Contact Us At: 1-800-988-2291
Email: info@calseal.com

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Chemraz® is a Registered Trademark of Greene Tweed and Company.