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Perfluoroelastomer Parts
A Product of DuPont Dow Elastomers
California Seal & Fastener, Inc. is an authorized Kalrez® Distributor for the Semiconductor Industry. We carry an extensive inventory in several locations across the country to meet your immediate requirements.
Kalrez perfluoroelastomer parts are available in a number of different compounds that are formulated to optimize properties and give the best possible performance in various applications. Modification of the finished properties is achieved by use of fillers and other additives.
Kalrez 9100 is a new, amber translucent product targeted specifically for deposition process applications, i.e., HDPCVD, PECVD, SACVD, Metal CVD, ALD, etc. It has also exhibited excellent performance in "select" etching and ashing/stripping process applications. Kalrez® 9100 has been specifically designed for low erosion and ultra-low particle generation in harsh plasma environments. It offers outstanding thermal stability, very low outgassing as well as excellent elastic recovery and mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300°C is suggested. Ultrapure post-cleaning and packaging is standard for all parts made from Kalrez® 9100.
Features/Benefits:
- Low erosion rate and ultra-low particle generation in oxygen and fluorine-based plasmas
- Excellent resistance to dry process chemistry
- Excellent thermal stability
- Very low outgassing properties and metals content
- Excellent elastic recovery and low compression set properties
Suggested Applications
- Gas inlet/orifice seals
- Chamber lid seals
- Isolation valve seals
- Bonded gate valves/slit valve door seals
Kalrez Sahara® 8085
Product Description
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Kalrez® Sahara™ 8085 has been specifically developed for plasma and gas deposition applications, i.e., etching, ashing, HDPCVD, PECVD, SACVD, etc. It has been formulated for minimal particle generation in NF3 plasma. Kalrez® Sahara™ 8085 exhibits very low particle generation and low weight loss in oxygen and fluorine-based plasmas, has excellent mechanical properties and is well-suited for both static and dynamic sealing applications (e.g., bonded slit valve doors, bonded gate valves, bonded pendulum valves, gas orifice seals, gas feedthrough seals, chamber lid seals, etc.) A maximum continuous service temperature of 240°C is suggested. Kalrez® Sahara™ 8085 can also withstand short-term excursions up to 275°C. Ultrapure post-cleaning and packaging is standard for parts made from Kalrez® Sahara™ 8085. Typical Physical Properties1 |
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Color |
Beige |
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Hardness, Shore A (pellet)2 |
80 |
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Hardness, Shore M (O-ring)3 |
86 |
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100% Modulus4, MPa |
7.5 |
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Tensile Strength at Break4, MPa |
16.3 |
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Elongation at Break4, % |
159 |
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Compression Set5, % 70 hr at 150°C 70 hr at 175°C 70 hr at 204°C |
28 35 42 |
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Max. Continuous Service Temperature6, °C |
240 |
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Max. Excursion Temperature6, °C |
275 |
Kalrez® Sahara™ 8575
Kalrez® Sahara™ 8575 is the newest addition to the Sahara family of ultrapure products. This compound, specially formulated for improved performance in etch, CVD and stripping processes, offers lower cost of ownership with reduced contamination and longer seal life. This white perfluoroelastomer compound utilizes a new proprietary polymer and crosslinking system. It builds on the excellent plasma resistance of Kalrez® Sahara™ 8375 with reduced weight loss, particle generation and outgassing, as well as improved elastic recovery properties. Sahara Plasma 8575 offers excellent resistance to oxygen and fluorine plasma as well as chlorinated celeaning gasses (e.g., CIF3), exhibits excellent vacuum and long-term sealing performance, has good mechanical properties and is well-suited for both static and dynamic dry process applications (e.g., slit valve doors, chamber lids, gas inlets, etc.). Its maximum continuous service temperature rating of 280°C is well above the typical requirements for seals used in these processes. Ulrapure post-cleaning and packaging is standard for all parts made of Plasma 8575.
Typical Properties
| Property | Value |
| Maximum Application Temperature, C° (F°) Maximum Application Pressure, MPa (psi) Durometer, Shore A: 100% Modulus, MPa (psi) Tensile Strength at Break, MPa (psi): Elongation at Break, %: Compression Set (70 hours at 204°C), %: |
280 (536) 5.150 (800) 74 2.500 (365) 12.000 (1745) 230 29 |
Standard Compounds
Compound 4079--- A low compression set compound for general purpose use in O-rings, diaphragms, seals and other parts used in the process and aircraft industries. It is a carbon black filled compound with excellent chemical resistance, good mechanical properties and outstanding hot air aging properties. It exhibits low swell in organic and inorganic acids and aldehydes and has good response to temperature cycling effects. A maximum operating temperature of 316ºC (600ºF) is recommended, with short excursions to higher temperatures possible. This compound is not recommended for use in hot water/steam applications or in contact with certain hot aliphatic amines, ethylene oxide and propylene oxide.
Compound 1050LF---A general purpose compound for O-rings, seals and other parts used in chemical process industries. It has good hot water/steam, excellent amine resistance and compression set properties. Maximum recommended service temperature of 288ºC (550ºF). Not recommended for use in organic or inorganic acids at high temperatures.
Ultra pure Compounds
Kalrez® Ultra pure Compounds are designed specifically for Semiconductor Manufacturing.
Ultra pure 4079---A low compression set compound for general use in many semiconductor process environments. This carbon black-filled compound offers excellent chemical resistance, good mechanical properties, and thermal stability up to 316ºC (600ºF).
Ultra pure 2037---A non-black-filled compound for use in many plasma environments. This compound offers excellent chemical resistance, good mechanical properties, and thermal stability up to 220ºC (428ºF).
Specialty Compounds
Note: Before ordering Kalrez parts in specialty compounds, please consult with DuPont or Distributor Technical Staff to determine properties needed for the application. Specialty compound products are generally not held in inventory.
Compound 1058---A carbon black filled compound that has been plasticized with a perfluoronated oil. It is the softest, lowest modulus compound available. Generally it is similar in chemical resistance to Compound 1050LF it has an upper service temperature of 260ºC (500ºF). Typically used in applications that require low sealing force or high extensibility including liquid chromatography septa, seals/seats for relief valves and tubing. Its shrinkage is greater than other Kalrez compounds; therefore, finished parts may differ from standard specifications.
Compound 1018---A carbon black filled compound of similar hardness to Compound 1050, but with high temperature capability up to 288ºC (550ºF). Has better hot water/steam resistance properties than all other compounds, except Compound 3018. Not recommended for use in organic or inorganic acids at high temperatures or for rapid temperature cycling applications.
Compound 3018---A carbon black filled compound similar to Compound 1018 except for higher hardness/modulus. This compound offers the best hot water/steam resistance and the best high pressure extrusion resistance. Generally used in oil field and process industry applications where these properties coupled with good amine and general chemical resistance are required.
Compound 2035---A carbon black filled compound that is well suited for selected applications in the finishing's equipment, pharmaceutical, semiconductor and chemical transportation markets. Compound 2035 has excellent chemical resistance exhibiting low swell in organic acids, inorganic acids, esters, ketones and aldehydes. It also offers good mechanical properties. A maximum service temperature of 218ºC (425ºF) is recommended.
Compound 2037---A non-black filled compound that is well suited for selected applications in the pharmaceutical, semiconductor and other markets that demand high quality purity elastomers. Compound 2037 has excellent chemical resistance, exhibiting low swell in organic acids, inorganic acids, esters, ketones and aldehydes. It also offers good mechanical properties. A maximum service temperature of 218ºC (425ºF) is recommended.
Miscellaneous Properties
Many miscellaneous properties are of interest for specific applications. Some of these are unaffected by compound choice, while others vary with hardness or extensibility. As an example, coefficient of friction typically increases as hardness decreases. In general, miscellaneous physical properties are similar to those of Viton ® fluoroelastomer.
Product Safety
Product safety information is available in Material Safety Data Sheets (MSDS) documentation.
Other specialty or custom compounds may be available or developed for applications that require different properties than the above compounds offer.
For More Information on Perfluoroelastomers
Please Contact Us At: 1-800-988-2291
Email: info@calseal.com
Kalrez® is a Registered Trademark of DuPont Dow Elatomers LLC.