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Permeation Data
| Material | He | O2 | H2O | N2 | CO2 |
| Nitrile | 8 | 2.5 | 760 | 0.1 | 25 |
| EPDM | 25-30 | 16-18 | - | 6-7 | 85 |
| VMQ | 250 | 75-480 | 8,000 | 200 | 2,000 |
| FVKM | 140 | 80 | - | 40 | 400 |
| FKM | 9-22 | 1-2 | 40 | 0.05-0.7 | 5 |
| FKM* | 30 | 3 | - | 2 | - |
| FFKM (PFE) | 60-80 | 6-8 | 90-100 | 8-12 | - |
| KEL-F | - | 0.1 | - | 0.1 | 0.5 |
| PTFE | - | 0.04 | - | 0.14 | 0.12 |
| Polyimide | 1.9 | 0.1 | - | 0.03 | 0.2 |
Permeation Data for Various Polymers (unit expressed in 10-8 sccm-cm/sec-cm2-atm)
*Highly fluorinated compound